Design and fabrication of an SU-8 biomimetic flapping-wing micro air vehicle by MEMS technology

作者：Chi, Pengcheng; Zhang, Weiping^*; Chen, Wenyuan; Li, Hongyi; Meng, Kun; Cui, Feng; Liu, Wu; Wu, Xiaosheng

来源：Robot, 2011, 33(3): 366-370.

DOI：10.3724/SP.J.1218.2011.00366

• Bio robots
• Bionics principles
• Flapping wing micro air vehicle
• MEMS fabrication
• Micro electromechanical system (MEMS)
• Micro electro mechanical system
• SU-8
• SU-8 photoresist

To develop a light biomimetic flapping-wing micro air vehicle, SU-8 photoresist in micro-electromechanical system (MEMS) field is used as its structural materials. Based on the bionics principle and MEMS technology, the structure and MEMS fabrication process are designed. The results show that this kind of structural design and production solution meet design requirements, and provide a good way for design and fabrication of flapping-wing micro air vehicle.

• 出版日期2011
• 单位上海交通大学