A General Analytical Formulation for the Motional Parameters of Piezoelectric MEMS Resonators

作者：Puder Jonathan M; Pulskamp Jeffrey S; Rudy Ryan Q; Polcawich Ronald G; Bhave Sunil A

来源：IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2018, 65(3): 476-488.

DOI：10.1109/TUFFC.2018.2793099

• Disk resonator
• lead zirconate titanate (PZT)
• microelectromechanical system (MEMS) resonator

This paper reports on a general analytical expression for the motional resistance (R-m) of an arbitrary mode in a piezoelectric microelectromechanical system resonator with parallel plate electrode geometry. After applying simplifying assumptions and using analytical modes shapes, expressions for the Rm of modes with out-of-plane flexure as the primary displacement are presented. These modes include free-free transverse beam flexure (TBF), unclamped disk flexure resonators (DFRs), and antisymmetric A(0) Lamb modes. For verification, Rm is extracted from resonators fabricated in a lead zirconate titanate on silicon process. Predicted Rm of TBF and DFR modes is validated using on-wafer extracted e(31) constants, analytical modal properties, and independently measured material properties.

• 出版日期2018-3