A new method for fabricating high density and large aperture ratio liquid microlens array

作者:Ren Hongwen*; Ren Daqiu; Wu Shin Tson
来源:Optics Express, 2009, 17(26): 24183-24188.
DOI:10.1364/oe.17.024183

摘要

Conventional liquid microlens arrays are facing bottlenecks in controlling droplet size and shape, and limited aperture ratio. We report a new liquid/solvent approach to overcome these obstacles for making uniform droplet array and achieving similar to 90% aperture ratio. The droplets are very stable due to the pinning effect of the polymer walls and substrate surfaces. Using the fabricated droplet array, we demonstrate a tunable-focus microlens array based on dielectrophoretic effect. The microlens array exhibits a large dynamic range and fast response time ( tens of milliseconds). Besides liquid microlens arrays, this fabrication method also opens a new door for making other tunable photonic devices.

  • 出版日期2009-12-21