A novel algorithm to enhance blurred microscopy images of metallic ultra thin-films microstructures

作者：Duadi Hamootal; Livshits Pavel^*; Gur Eran; Inberg Alexandra; Shacham Diamand Yosi; Weiss Aryeh; Zalevsky Zeev

来源：Microelectronic Engineering, 2012, 92: 145-148.

DOI：10.1016/j.mee.2011.04.018

• ULSI copper and silver interconnect microstructure
• Image enhancement algorithm

In this work, a novel algorithm for improvement of blurred SEM and TEM images of metal ultra-thin films%26apos; microstructure has been developed. The algorithm, differently from other existing methods which are based on a priori knowledge about the inspected sample or the imaging system, takes into account the a priori knowledge about the microstructures grain size and shape ranges. The feasibility of the algorithm was examined on totally blurred HRSEM images of copper and silver films microstructures. Our study shows that this algorithm can also be used to improve indistinct images of filled trenches/vias. Thereby, the algorithm may obviate the need for time-consuming selection of SEM/TEM measurement conditions.

• 出版日期2012-4