Hierarchical Manipulation of Block Copolymer Patterns on 3D Topographic Substrates: Beyond Graphoepitaxy

作者:Park Sungjune; Cheng Xiao; Boeker Alexander; Tsarkova Larisa
来源:Advanced Materials, 2016, 28(32): 6900-+.
DOI:10.1002/adma.201601098

摘要

Templates of complex nanopatterns in a form of hierarchically sequenced dots and stripes can be generated in block copolymer films on lithography-free 3D topographic substrates. The approach exploits thickness- and swelling-responsive morphological behavior of block copolymers, and demonstrates novel possibilities of topography-guided registration of nanopatterns due to periodic confinement and spontaneous orthogonal flow-fields.

  • 出版日期2016-8-24