Autocatalytic electroless deposition of palladium onto p-silicon (100)

作者：Chen Yang; Jing Fen Ning; Ye Wei Chun; Wang Chun Ming^*

来源：Acta Physico - Chimica Sinica, 2007, 23(11): 1743-1746.

• autocatalytic electroless deposition
• anodic stripping
• palladium
• atomic force microscopy
• p-silicon (100)

The autocatalytic electroless deposition (AED) of palladium onto p-silicon (100) with hydrogen termination was studied. Pd films were prepared by immersing the hydrogen-terminated silicon wafers into conventional HF-PdCl2-HCl solution at room temperature. The anodic stripping behaviors and morphologies of the Pd deposits were studied using cyclic voltammetry (CV), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). The results showed that the Pd growth was in Volmer-Weber (VW) mode and the Pd film had good adhesion.

• 出版日期2007-11
• 单位兰州大学