科研之友
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摘要
In order to overcome the nonlinearity of the conventional servomechanism driven by ball screws, coreless linear motors are directly used to drive air bearing slides. Linear encoders with a resolution of 1.2 nm are used as position feedbacks. A dynamics model is established for stacked X-Y stages, and the system resonance is then theoretically analyzed and experimentally verified. In order to improve the performance of the stacked stages, a compound proportional-integral-derivative controller with a notch filter is developed using zero-pole assignment and model parameter matching method. Experimental results show that the controller developed can work to reduce the mechanical resonance caused by the cross-coupled stiffness, and the minimum positioning resolution of the micromilling machine is 20 nm. To track a sinusoidal signal with a frequency of 30 Hz and an amplitude of 5 mu m, the phase lag is less than 10 degrees and the amplitude attenuation is less than 10% for all the three axes.
- 出版日期2009-5
- 单位哈尔滨工业大学
