An alternative fluorine precursor for the synthesis of SnO2:F by spray pyrolysis

作者：Arca E^*; Fleischer K; Shvets I V

来源：Thin Solid Films, 2012, 520(6): 1856-1861.

DOI：10.1016/j.tsf.2011.09.016

• Fluorinated tin oxide (SnO2:F)
• Transparent conductive oxide (TCO)
• Fluorine source
• Spray-pyrolysis

An alternative, non-toxic precursor was employed for the synthesis of SnO2:F transparent conducting oxide. The performance of benzenesulfonyl fluoride (BSF) as F source for spray pyrolysis was investigated. Its decomposition and the actual incorporation of fluorine in the tin oxide matrix were confirmed by X-ray photoelectron spectroscopy while its effect on the electrical properties was investigated by resistance and Hall measurements. Results were compared with respect to samples grown using a common fluorine source (NH4F), a commercial available sample and a sample grown by spray pyrolysis at an independent laboratory. We show that BSF leads to actively doped conductive SnO2 with good carrier mobility, though the fluorine incorporation rate and hence overall conductivity of the films is lower than for fluorine precursors commonly used in spray pyrolysis.

• 出版日期2012-1-1