Analysis of sub-THz radiation detector built of planar antenna integrated with MOSFET

作者：Kopyt P^*; Zagrajek P; Marczewski J; Kucharski K; Salski B; Lusakowski J; Knap W; Gwarek W K

来源：MICROELECTRONICS JOURNAL, 2014, 45(9): 1168-1176.

DOI：10.1016/j.mejo.2014.04.004

• Substrate modes
• Silicon devices
• Submillimeter-wave devices
• Computational modeling
• Mathematical model
• Narrow-band antenna

In this paper an approach to analysis of responsivity of MOSFET-based detectors of THz radiation has been presented. The authors have analyzed the substrate modes that affect performance of antennas that are always used as a part of detecting structures, and should be accounted for by proper choice of the substrate geometry. Then, a methodology to combine extracted properties of an arbitrary antenna with properties of the transistor channel has been described and employed to estimate responsivity of a detector built of a particular MOSFET integrated with several antenna structures. Finally, example detectors were fabricated and measured using sub-THz radiation sources operating in the combined bandwidth 220-360 GHz. Measurement results were compared with predictions which lead to conclusions on possible levels of the impedance of the transistor channel at these frequencies.

• 出版日期2014-9