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摘要
The paper presents the results of investigations concerning the measurement of the refractive index and the thickness of planar waveguide structures, obtained by photo polymerization of the polymer SU8. In the paper the mode sensitivity has been calculated as a function of the thickness in a single-mode structure. The thickness of the layer has been determined in the case when the interferometer is most sensitive to changes of the refractive index.
- 出版日期2011-12
