摘要

In the paper, a semiconductor laser factor changeable sinusoidal light frequency modulation model for the interferometric displacement sensor is put forward mathematically. The shortcomings of the interferometric system based on light frequency ramp modulation, such as Gibb's phenomenon, the spurious sideband effect and the relatively small range of the displacement measurement, are overcome. In particular, by the proper mathematical deductions, the direction of the phase shift according to movement of the measurand (the tendency towards an increment or decrement) can be shown. Experimental results show that our new system is more stable and accurate than the light frequency ramp modulated one.