Anti-disturbance phase-shifting interferometry method time-and-frequency-domain

作者：Wang Ming^*; Hao Qun; Zhu Qiudong; Hu Yao

来源：Acta Optica Sinica, 2011, 31(11): 1112005-1-1112005-5.

DOI：10.3788/AOS201131.1112005

• Anti disturbance
• Measurement
• Phase-shifting interferometry
• Time-and-frequency domain method

Because interferometry is highly sensitive to disturbance such as vibration and air flow, a time-and-frequency domain (TFD) interferometry is proposed. A large number of continuous phase-shifting interferograms are captured. A distorted series of phase variety during fringe capturing is obtained through wide bandwidth filter to the spectrum of intensity series from a particular pixel, and then a linear statistic of it gives the measuring result of initial phase. With a large enough number of frames, the linear statistic efficiently reduces random noises to zero. And influences introduced by other non-random disturbances are astringed into a value which is independent of the index of pixels and therefore does not influence the shape of the whole wavefront. A simulation confirms the feasibility of the TFD method, and an experiment is carried out applying TFD method in a mechanical phase-shifting interferometric system fixed in a normal laboratory environment. The result prettily matches that from a FISBA interferometer, which verifies the anti-noise ability of TFD method.

• 出版日期2011
• 单位北京理工大学