科研之友
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摘要
Need for drilling micro holes has been on rise in many miniature applications including biotechnology. Micro machining of such features is difficult to realize, particularly on difficult-to-machine hard and brittle materials like soda lime glass. Defect characterization with precision in micro-nano scale is even more challenging. Conventional approaches appear inadequate in such cases while fabrication as well as in characterization. In the present work, holes of 900 mu m diameter were drilled on soda lime glass using a novel thermal-based approach called 'microwave drilling'. It uses the phenomenon of thermal ablation with plasma heat created by the applied microwave energy through a tool. The energy was applied in the range of 90-900 W at 2.45 GHz in a multi-mode applicator. The glass specimens were subjected to high localized heat, which also caused some defects like cracking and deformation due to melting in the drilling zone. A photoelasticity approach was employed to characterize these defects. A setup was developed using a polarizer and a CCD camera to obtain the birefringence patterns. The patterns were analyzed to assess the defects. The microwave drilling process was also simulated and the stress-temperature relationships were studied. Simulation results substantiated the experimental observations. Details are discussed with evidences.
- 出版日期2015-11
