Analysis of nonlinear dynamic behavior and pull-in prediction of micro circular plate actuator

作者：Liu Chin Chia; Liu Chien Hung

来源：Journal of Vibroengineering, 2014, 16(4): 2062-2069.

• micro circular plate
• pull-in voltage
• MEMS
• hybrid method
• differential transformation
• finite difference method

The dynamic behavior of micro circular plate electrostatic devices is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. Accordingly, the present study proposes a approach for analyzing the dynamic response of such devices using a hybrid numerical scheme comprising the differential transformation method and the finite difference method. The feasibility of the proposed approach is demonstrated by modeling the dynamic response of a micro circular plate actuated by a DC voltage. The numerical results for the pull-in voltage are found to deviate by no more than 0.27 % from those derived in the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC/AC loading scheme in driving the micro circular actuator is examined. It is shown that the use of an AC actuating voltage in addition to the DC driving voltage provides an effective means of tuning the dynamic response of the micro circular plate.

• 出版日期2014-6