摘要

2D periodic arrays of carbon microholes were facilely prepared by a nanosphere lithographic technique. The whole fabrication process included the formation of PS sphere-packed template on a PDMS film, infiltrating perfluoropolyether (PFPE) into the voids among PS spheres and thermal decomposition of the filled polymer. The morphologies and chemical components of the obtained samples after selectively heating at different temperatures were investigated by scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS). The originally polymeric microstructure with 2D periodic pores was converted into the ultimately carbon microhole arrays after a thermal treatment at 600 degrees C in argon, which indicated that the carbon based microstructure with a specific morphology could be generated using UV-curable PFPE as the carbon precursor.

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