摘要

Multiphysics numerical simulation (MPNS) has certainly acquired a wide acceptance in the modeling, designing and fabrication fields and has been validated for various research applications. But it is important that the method should be thoroughly understood by students of the various fields. Keeping this aim in view, we demonstrate here the MPNS process as applied in several fields, such as: electrostatics, mechanics, chemistry, heat transfer and fluid flow. Four tasks are performed for fifteen hours in order to analyze simulation approaches such as modeling with geometrical parameters, meshing, solution and post-processing methods. Convection, buoyancy effects, microfiltration and flow analysis are investigated. This comprehensive study will enhance appreciation of the basic concepts of design and dimensioning of an object in MEMS for engineers, and help to guide workers in these fields when performing these tasks. ? (2011) Trans Tech Publications, Switzerland.

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