作者：Ahmad Ahmad; Nikolov Nikolay; Angelov Tihomir; Ivanov Tzvetan; Reum Alexander; Atanasov Ivaylo; Guliyev Elshad; Ishchuk Valentyn; Kaestner Marcus; Krivoshapkina Yana; Lenk Steve; Lenk Claudia; Rangelow Ivo W; Holz Mathias
来源：Journal of Vacuum Science and Technology B, 2016, 34(6): 06KM03.
DOI：10.1116/1.4967159
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