Analyzing UV/Vis/NIR spectra with the single-layer model-Sputtered SnS thin films I: Space-time dependencies

作者：Stadler A^*; Schimper H J; Brendel U; Topa D; Basch A; Dittrich H

来源：Thin Solid Films, 2011, 519(22): 7951-7958.

DOI：10.1016/j.tsf.2011.04.234

• Optical spectroscopy
• UV/Vis/NIR
• Optical conductivity
• Tin-sulphide
• Thin films
• Sputtering

Exact, contact-free and non-destructive, optical analysis of semiconducting layers, are advantageous for thin film solar cell applications. A non-numerical theoretical model has been developed to extract approximation-free optical and electrical data from UV/Vis/NIR spectra. Special focus has been set on single layers; an adequate single-layer model is provided. Complex parameter evaluation is possible.
This exact data acquisition model provides deeper insights in the process-parameter dependencies of pulsed direct current and radio frequency sputtered, opaque tin-sulphide thin films upon glass substrates. They have been analysed with respect to space-time dependencies of the sputter process. Therefore, sputter-depositions have been examined, referring to positions upon the substrate, r, target-substrate distances, d(TarSub), and sputter durations, t(Sp). Theoretical sputter-concepts were proved and enhanced. Results were compared with those of the well-known Keradec/Swanepoel model. The necessity of taking both spectra transmission and reflection spectra into account has been shown.
A non-contact, optical conductivity measurement possibility by use of UV/Vis/NIR spectroscopy has been provided. Optically evaluated conductivities, rib were compared with electrically taken values, by use of a four-tip measurement system.

• 出版日期2011-9-1