Size selective filtration of silicon nano-structures using AFI AlPO4-5 zeolite pores

作者：Choo CK^*; Enomoto K; Tanaka K

来源：Materials Science and Engineering B-Solid State Materials for Advanced Technology, 2003, 104(1-2): 73-79.

DOI：10.1016/S0921-5107(03)00315-5

• zeolites
• silicon
• ammonia
• nano-structures
• laser ablation
• photoluminescence

The ablation of Si has been carried out in the presence of ammonia ambient. Non-stoichiometric (silicon rich) silicon nitride composed of Si-Si, NHx (x = 1.2) and SiHy (y = 1-3) are formed. Photoluminescence at visible region based on these nano-structures was observed at room temperature. AlPO4-5 zeolite was used as substrate. It is shown that zeolite can selectively control the size of the Si nano-structure and the emission wavelength as well, and that the deposited Si-N nano-structures can be migrated into the AlPO4-5 pores by annealing treatment. The photoluminescence red-shifted after annealing suggests that, the Si nano-crystals luminescence is ruled in the luminescence center. A theoretical model is proposed to explain the PL peak shift of the silicon nano-structures.

• 出版日期2003-11-15