A Highly Scalable Interface Fuse for Advanced CMOS Logic Technologies

作者：Yang Li Yu^*; Hsieh Min Che; Liu Jheng Sin; Chin Yung Wen; Lin Chrong Jung

来源：IEEE Electron Device Letters, 2012, 33(2): 245-247.

DOI：10.1109/LED.2011.2175696

• Electrically programmable
• fuse
• metal-contact interface

In this letter, we propose a novel interface fuse (iFuse) for low-power electrically programmable fuses in advanced CMOS applications. With an offset-landed metal-to-contact or contact-to-polysilicon structure, the iFuse can be programmed by substantially reduced current as compared to conventional fuses. A diagonal contact layout and the optical pattern correction scheme can further improve the cell stability as well as its programming characteristics.

• 出版日期2012-2
• 单位中国科学院电工研究所; 清华大学