About the formation and avoidance of C and N related precipitates during directional solidification of multi-crystalline silicon from contaminated feedstock

作者：Reimann C^*; Trempa M; Friedrich J; Mueller G

来源：Journal of Crystal Growth, 2010, 312(9): 1510-1516.

DOI：10.1016/j.jcrysgro.2010.02.003

• Directional solidification
• Impurities
• Mass transfer
• Vertical gradient freeze
• Multi-crystalline silicon
• Solar cells

Multi-crystalline silicon ingots with a diameter of 6 cm and a height of 4-5 cm were directionally solidified in a laboratory scale crystal growth facility within a Si(3)N(4)-coated fused silica crucible with a growth rate of 1 cm/h for two different conditions of convective transport in the melt. The feedstock quality was varied from "pure" (electronic grade) to highly carbon-contaminated and highly nitrogen-contaminated. It will be demonstrated that under certain convective process conditions even for a highly contaminated feedstock (C and N) a mc silicon ingot can be grown which has an axially and radially homogenous carbon and nitrogen concentration in the range 3-4 x 10(17) C-atoms/cm(3) and 2-4 x 10(15) N-atoms/cm(3), respectively, and is free of SiC- and Si(3)N(4)-precipitates in the bulk.

• 出版日期2010-4-15