摘要

For the requirements of solar cell and laser system, we designed two kinds of broadband antireflective (AR) coatings prepared by sol-gel method using acid and base-catalyzed silica sols and acid-catalyzed titania sol. Titania film and acid-catalyzed silica film were employed as high and low refractive index layers separately based on lambda /4- lambda /2 optical thickness structure. Acid and base-catalyzed silica films were chosen as high and low-index layers separately based on lambda /4- lambda /4 structure. SiO2/TiO2 AR coating features an M-shape broadband transmission spectrum and presents a perfect scratch-resistant ability, which can meet the requirement of solar glass. SiO2/SiO2 AR coating features a flat broadband transmission spectrum and presents both water-repellency and scratch resistance, which is suitable for the laser disk amplifiers used in high power laser system. Post treatments are very important for realizing these functionalities. Heat treatment seriously impacts the refractive index of the TiO2 film that is decisive for the AR function, while ammonia and Trimethylchlorosilane treatments decide the water-repellency and scratch resistance of the SiO2/SiO2 system. All the films were deposited by dip coating method, which is applicable for large size substrate.