High Q factor InP photonic crystal nanobeam cavities on silicon wire waveguides

作者:Crosnier Guillaume; Sanchez Dorian; Bazin Alexandre; Monnier Paul; Bouchoule Sophie; Braive Remy; Beaudoin Gregoire; Sagnes Isabelle; Raj Rama; Raineri Fabrice
来源:Optics Letters, 2016, 41(3): 579-582.
DOI:10.1364/OL.41.000579

摘要

High-quality (Q) factor indium phosphide (InP)-based 1D photonic crystal nanobeam cavities are fabricated on silicon on insulator waveguides. Through the optimization of the fabrication process, the intrinsic Q factor of these fully encapsulated nanocavities is demonstrated to attain values higher than 100,000. Experimental and numerical investigations are carried out on the impact, on the Q factor, of the strength of the evanescent wave coupling between the cavity and the waveguide. We reveal that this coupling can result in a modification of the electromagnetic field distribution in the resonant mode, which gives rise up to a factor 4 reduction in the intrinsic Q factor for the structures under study.

  • 出版日期2016-2-1