Analysis of chemical shifts in Auger electron spectra versus sputtering time from passivated surfaces

作者：Domanowska Alina^*; Adamowicz Boguslawa; Bidzinski Piotr; Klimasek Andrzej; Szewczenko Janusz; Gutt Tomasz; Przewlocki Henryk

来源：Optica Applicata, 2011, 41(2): 441-447.

• Auger electron spectroscopy (AES)
• interfaces
• passivation
• evolutionary algorithms

Chemical shifts in Auger electron spectra versus Ar(+) ion sputtering time were analysed for various passivated interfaces, including SiO(2)(100 nm)/Si, SiO(2)(40 nm)/4H-SiC structures and native oxide/austenitic stainless steel 316LVM. On this basis, in-depth profiles of chemical composition were determined and the thickness of passivation nanofilms was estimated. Quantitative numerical analysis was performed by means of a developed computer procedure for both the AES spectrum background subtraction and peak decomposition with pseudo-Voigt functions using evolutionary algorithms.

• 出版日期2011