科研之友
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摘要
Cylindrical probe data have been analyzed using different theories in order to determine some plasma parameters (electron temperature and electron and ion densities). Langmuir probe data are obtained in a cylindrical DC glow discharge in the positive column plasma at argon gas pressures varied from 0.5 to 6 Torr and at constant discharge current equal to 10 mA. The electron density has calculated from the electron current at the space potential and from Orbital Motion Limited (OML) collisionless theory. Ion density has obtained from the OML analysis of the ion saturation currents. In addition, the electron temperature has measured by three different methods using probe and electrons currents. The electron temperature T (e) , plasma density n (e) , and space potential V (s) , have been obtained from the measured single cylindrical probe I-V characteristic curves. The radial distribution of the electron temperature and plasma density along the glow discharge are measured and discussed. Using the collisionless theories by Langmuir cylindrical probe and up to several Torr argon gas pressures the differences between the values of electron temperature and electron and ion densities stay within reasonable error limits.
- 出版日期2013-3
