A probe with ultrathin film deflection sensor for scanning probe microscopy and material characterization

作者：Gaitas Angelo^*; Li Tao; Zhu Weibin

来源：Sensors and Actuators A: Physical , 2011, 168(2): 229-232.

DOI：10.1016/j.sna.2011.04.023

• Scanning probe microscope
• Piezoresistive sensor
• Microcantilever
• Elastography
• Material characterization
• Mechanical characterization

We report a microcantilever probe with a 5 nm gold deflection sensor for the study of local mechanical properties such as adhesion and elasticity on a sample. The probe has a dynamic range of tens of microns, which allows for a deeper insight into the mechanical properties of materials. The gauge factor of the piezoresistive sensor is 4.1 +/- 0.1 and the deflection sensitivity is 0.1 ppm/nm. Noise analysis indicates a minimum detectable deflection of approximate to 0.7 nm. Topographical scans are demonstrated. Studies of adhesion and stiffness of two different samples demonstrate the usefulness of the probe in the investigation of local mechanical properties.

• 出版日期2011-8-10