A Micro Gas Sensor Using TiO2 Nanotubes to Detect Volatile Organic Compounds

作者：Kida Tetsuya^*; Seo Min Hyun; Suematsu Koichi; Yuasa Masayoshi; Kanmura Yuichi; Shimanoe Kengo

来源：Applied Physics Express, 2013, 6(4): 047201.

DOI：10.7567/APEX.6.047201

To develop a portable gas sensor with low power consumption, we deposited a micro size sensing film (100 x 100 mu m(2)) on a Si substrate with an integrated micro heater and electrodes constructed using micro-electro-mechanical system (MEMS) technology. TiO2 nanotubes ca. 500 nm long with a 50 nm diameter were used to sense and detect volatile organic compounds (VOCs). We demonstrate that the MEMS sensor responded well to ethanol and toluene in air at elevated temperatures, such as 500 degrees C, which suggests that it is a promising battery-operable micro gas sensor for detecting VOCs.

• 出版日期2013-4