Dual-Stage Nanopositioning for High-Speed Scanning Probe Microscopy

作者：Tuma Tomas^*; Haeberle Walter; Rothuizen Hugo; Lygeros John; Pantazi Angeliki; Sebastian Abu

来源：IEEE/ASME Transactions on Mechatronics, 2014, 19(3): 1035-1045.

DOI：10.1109/TMECH.2013.2266481

• Atomic force microscopy (AFM)
• control design
• mechatronics
• nanopositioning

This paper presents a dual-stage approach to nanopositioning in which the tradeoff between the scanner speed and range is addressed by combining a slow, large-range scanner with a short-range scanner optimized for high-speed, high-resolution positioning. We present the design, finite-element simulations, and experimental characterization of a fast custom-built short-range scanner. The short-range scanner is based on electromagnetic actuation to provide high linearity, has a clean, high-bandwidth dynamical response and is equipped with a low-noise magnetoresistance-based sensor. By using advanced noise-resilient feedback controllers, the dual-stage system allows large-range positioning with subnanometer closed-loop resolution over a wide bandwidth. Experimental results are presented in which the dual-stage scanner system is used for imaging in a custom-built atomic force microscope.

• 出版日期2014-6