Optical and Electrical Properties Evolution of Diamond-Like Carbon Thin Films with Deposition Temperature

作者：Ding Xu Li^*; Li Qing Shan; Kong Xiang He

来源：Chinese Physics Letters, 2009, 26(2): 027802.

DOI：10.1088/0256-307x/26/2/027802

Optical and electrical properties of diamond-like carbon (DLC) films deposited by pulsed laser ablation of graphite target at different substrate temperatures are reported. By varying the deposition temperature from 400 to 25 degrees C, the film optical transparency and electrical resistivity increase severely. Most importantly, the transparency and resistivity properties of the DLC films can be tailored to approaching diamond by adjusting the deposition temperature, which is critical to many applications. DLC films deposited at low temperatures show excellent optical transmittance and high resistivity. Over the same temperature regime an increase of the sp(3) bonded C content is observed using visible Raman spectroscopy, which is responsible for the enhanced transparency and resistivity properties.

• 出版日期2009-2
• 单位鲁东大学; 曲阜师范大学