Highly (001)-oriented thin continuous L1(0) FePt film by introducing an FeOx cap layer

作者：Liao Jung Wei^*; Huang Kuo Feng; Wang Liang Wei; Tsai Wu Chang; Wen Wei Chih; Chiang Chao Chien; Lin Hong Ji; Chang Fan Hsiu; Lai Chih Huang

来源：Applied Physics Letters, 2013, 102(6): 062420.

DOI：10.1063/1.4793189

We demonstrate a thin and continuous L1(0) FePt film with a well-aligned (001) texture directly grown on Si parallel to SiO2 substrates by introducing an FeOx cap layer. The agglomeration of capped FePt films is greatly suppressed by inhibiting the surface diffusion. This, in turn, yields a continuous and smooth film, which significantly promotes the (001) out-of-plane orientation and perpendicular anisotropy. The reduction of Fe oxides occurs during annealing, which not only promotes interdiffusion of Fe and Pt for L1(0) ordering but also removes the cap layer simultaneously. Therefore, additional etching for the cap layer is not required for further fabricating bit patterned media.

• 出版日期2013-2-11
• 单位清华大学