科研之友
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摘要
Thin diamond layers were deposited over a Si substrate by the hot filament chemical vapor deposition technique by using MeH and H-2 gas mixture. The layers were analyzed by scanning electron microscopy and Raman spectroscopy. The diamond film morphol. and quality strongly depended on the MeH/H-2 ratio in the working gas. The films showed (111), (100) and ball-like morphol.
- 出版日期2012-1
