An Overview of Electrospray Applications in MEMS and Microfluidic Systems

作者：Chiarot Paul R^*; Sullivan Pierre; Ben Mrad Ridha

来源：Journal of Microelectromechanical Systems, 2011, 20(6): 1241-1249.

DOI：10.1109/JMEMS.2011.2168810

• Biomedical engineering
• electrohydrodynamics
• electrospray
• microelectromechanical systems (MEMS)

Integrating electrospray into microelectromechanical systems (MEMS) and microfluidic systems supports applications in diverse fields from biotechnology to aerospace. Electrospray also functions as a production tool, allowing for novel methods of MEMS fabrication. This review covers the three most significant applications of electrospray in MEMS and microfluidic systems technology: 1) as an integral part of a microfluidic device, most notably electrospray emitters for coupling a microfluidic chip to a mass spectrometer; 2) as a method for fabricating and manufacturing MEMS; and 3) for micropropulsion in aerospace applications using MEMS-based emitters. Perspectives on future research directions and opportunities are provided.

• 出版日期2011-12