An angled nano-tunnel fabricated on poly(methyl methacrylate) by a focused ion beam

作者：Her Eun Kyu; Chung Hee Suk; Moon Myoung Woon^*; Oh Kyu Hwan

来源：Nanotechnology, 2009, 20(28): 285301.

DOI：10.1088/0957-4484/20/28/285301

Angled nano-scale tunnels with high aspect ratio were fabricated on poly(methyl methacrylate) (PMMA) using a focused ion beam (FIB). The fabrication parameters such as ion fluence, incidence angle, and acceleration voltage of the Ga(+) ion beam were first studied on the PMMA surface to explore the formation of the nano-scale configurations such as nano-holes and cones with diameter in the range of 50-150 nm at an ion beam acceleration voltage of 5-20 kV. It was also found that the PMMA surface exposed to FIB was changed into an amorphous graphitic structure. Angled nano-scale tunnels were fabricated with high aspect ratio of 700-1500 nm in depth and 60 nm in mean diameter at an ion beam acceleration voltage of 5 kV and under a specific ion beam current. The angle of the nano-tunnels was found to follow the incident angle of the ion beam tilted from 0 degrees to 85 degrees, which has the potential for creating a mold for anisotropic adhesives by mimicking the hairs on a gecko's feet.

• 出版日期2009-7-15