Deposition and characterization of diamond-like nanocomposite coatings grown by plasma enhanced chemical vapour deposition over different substrate materials

作者：Mallik Awadesh Kr^*; Dandapat Nanadadulal; Ghosh Prajit; Ganguly Utpal; Jana Sukhendu; Das Sayan; Guha Kaustav; Rebello Garfield; Lahiri Samir Kumar; Datta Someswar

来源：Bulletin of Materials Science, 2013, 36(2): 193-202.

DOI：10.1007/s12034-013-0465-0

• Diamond-like carbon
• plasma CVD
• coatings
• tribology

Diamond-like nanocomposite (DLN) coatings have been deposited over different substrates used for biomedical applications by plasma-enhanced chemical vapour deposition (PECVD). DLN has an interconnecting network of amorphous hydrogenated carbon and quartz-like oxygenated silicon. Raman spectroscopy, Fourier transform-infra red (FT-IR) spectroscopy, transmission electron microscopy (TEM) and X-ray diffraction (XRD) have been used for structural characterization. Typical DLN growth rate is about 1 m/h, measured by stylus profilometer. Due to the presence of quartz-like Si:O in the structure, it is found to have very good adhesive property with all the substrates. The adhesion strength found to be as high as 0 center dot 6 N on SS 316 L steel substrates by scratch testing method. The Young%26apos;s modulus and hardness have found to be 132 GPa and 14 center dot 4 GPa, respectively. DLN coatings have wear factor in the order of 1 x 10 (-aEuro parts per thousand 7) mm (3) /N-m. This coating has found to be compatible with all important biomedical substrate materials and has successfully been deposited over Co-Cr alloy based knee implant of complex shape.

• 出版日期2013-4