A calibrator based on the use of low-coherent light source straightness interferometer and compensation method

作者：Lin Shyh Tsong^*; Yeh Sheng Lih; Chiu Chi Shang; Huang Mou Shan

来源：Optics Express, 2011, 19(22): 21929-21937.

A calibrator utilizing a low-coherent light source straightness interferometer and a compensation method is introduced for straightness measurements in this paper. Where the interference pattern, which is modulated by an envelope function, generated by the interferometer undergoes a shifting as the Wolaston prism of the interferometer experiences a lateral displacement, and the compensation method senses the displacement by driving the prism back to the position to restore the pattern. A setup, which is with a measurement sensitivity of 36.6 degrees /mu m, constructed for realizing the calibrator is demonstrated. The experimental results from the uses of the setup reveal that the setup is with a measurement resolution and stability of 0.019 and 0.08 mu m, respectively, validate the calibrator, and confirm the calibrator's applicability of straightness measurements and advantage of extensible working distance.

• 出版日期2011-10-24