Dependence of the properties of phase change random access memory on nitrogen doping concentration in Ge2Sb2Te5

作者：Fang Lina Wei Wei; Zhao Rong; Li Minghua; Lim Kian Guan; Shi Luping; Chong Tow Chong; Yeo Yee Chia^*

来源：Journal of Applied Physics, 2010, 107(10): 104506.

DOI：10.1063/1.3383042

The dependence of the electrical properties of Ge2Sb2Te5 on nitrogen doping concentration was investigated, which was explained based on the trends in the materials properties of nitrogen-doped Ge2Sb2Te5. The effect of nitrogen doping in Ge2Sb2Te5 on the crystallization temperature and changes upon annealing with various nitrogen concentrations were thus exploited to explain the trends. X-ray diffraction analysis corroborates the necessity to transform to the metastable face-centered-cubic phase, and showed that direct conversion to the stable hexagonal-close-packed phase which occurs at higher nitrogen concentrations could adversely affect device performance. Approaches for enhancement of thermal stability and reduction in reset current in phase change memory devices were also discussed.

• 出版日期2010-5-15