Least-squares refinement of biaxial stress components and unit-cell parameter in a < 111 > textured cubic TiN polycrystalline thin film by X-ray diffraction

作者：Yokoyama Ryouichi^*; Harada Jimpei; Akiniwa Yoshiaki

来源：Powder Diffraction, 2010, 25(1): 25-30.

DOI：10.1154/1.3314899

• residual stress
• texture
• stress-free unit-cell parameter
• least-squares refinement

Biaxial residual stress in a < 111 > textured cubic TiN polycrystalline thin film was analyzed by linear least-squares refinement using the method proposed by Yokoyama and Harada [J. Appl. Crystallogr. 42, 185-191 (2009)]. Values of the unstressed (or stress-free) unit-cell parameter a(0) =4.2332+/-0.0006 angstrom and the stress components of sigma(11)=397(88), sigma(22)=401(88), and sigma(12)=-110(100) MPa were obtained. The values of the in-plane stresses sigma(11) and sigma(22) presented in the TiN film are practically the same, while sigma(12) is relatively small. The results obtained in this study confirm that the above theoretical prediction by Yokoyama and Harada call be used to obtain reliable values of stress-free unit-cell parameter and three biaxial stress components of a textured cubic thin film.

• 出版日期2010-3