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摘要
The all temperature range stability is the most important technology of MEMS angular velocity sensor according to the principle of capacity detecting. The correlation be tween driven force and zero-point of sensor is summarized according to the temperature characteristic of the air-damping and resonant frequency of sensor header. A constant trans-conductance high-linearity amplifier is designed to realize the low phase-drift and low amplitude-drift interface circuit at all-temperature range. The chip is fabricated in a standard 0.5 mu m CMOS process. Compensation achieved by driven force to zero-point drift caused by the stiffness of physical construction and air-damping is adopted. Moreover, the driven force can be obtained from the drive-circuit to avoid the complex sampling. The test result shows that the zero-point drift is lower than 30 degrees/h (1-sigma) at the temperature range from -40 degrees C to 60 degrees C after three-order compensation made by force.
- 出版日期2017-2-28
- 单位哈尔滨工业大学
