Dependence of crystal structure and work function of WNx films on the nitrogen content

作者：Jiang Pei Chuen^*; Lai Yi Sheng; Chen J S

来源：Applied Physics Letters, 2006, 89(12): 122107.

DOI：10.1063/1.2349313

The effect of nitrogen content on crystal structure (phase and grain size) and work Phi(m)) of WNx films is investigated. The Phi(m) of WNx films is extracted from the plot of flatband voltage versus SiO2 thickness. For W and WN0.4 films, the Phi(m) are 4.67 and 4.39 V, and their crystal phases are both body-centered-cubic W. For WN0.6 film, it contains W+W2N mixed phases and the Phi(m) is 4.50 V. On the other hand, the Phi(m) of WN0.8 and WN1.5 films are 5.01 and 4.49 V, and their crystal phases are both face-centered-cubic W2N. The grain size of W and W2N phases decreases with the increase of the nitrogen content in WNx. It is concluded that the Phi(m) is affected by the crystal phase as well as the grain size of WNx film.

• 出版日期2006-9-18