Analysis of anchor and interface losses in piezoelectric MEMS resonators

作者：Frangi A^*; Cremonesi M; Jaakkola A; Pensala T

来源：Sensors and Actuators A: Physical , 2013, 190: 127-135.

DOI：10.1016/j.sna.2012.10.022

This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.

• 出版日期2013-2-1