Modification of surface properties of silicon micro-molds by nitrogen and silicon doped diamond-like carbon coatings deposited with magnetron co-sputtering

作者：Saha B; Liu E; Tor S B^*; Hardt D E; Chun L H

来源：Vacuum, 2011, 85(12): 1105-1107.

DOI：10.1016/j.vacuum.2010.12.030

• N and Si doped DLC coating
• Magnetron co-sputtering
• Si micro-mold
• Friction
• Surface energy

This paper investigated the effect of nitrogen gas (N(2)) flow rate on the structural, mechanical and tribological properties of nitrogen (N) and silicon (Si) doped diamond-like carbon (Si:DLC:N) coatings deposited on Si micro-molds via magnetron co-sputtering deposition with respect to the bare Si molds. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) showed that the amount of sp(2) bonds and cluster size of the coatings increased with the increase in N(2) flow rate. It was noticed that the surface roughness (Rq) of the Si:DLC:N coated molds increased from about 3.8 to 7.8 nm with increased nitrogen flow rate from 5 x 10(-6) to 25 x 10(-6) m(3)/min, but the variation of roughness between the coated and uncoated Si molds was not significant. Ethylene glycol and deionized (DI) water were used to measure their contact angles with the mold surfaces, which were used to evaluate the surface energy of the molds. The total surface energy of the coated molds increased from about 38.2 x 10(-3) to 66.5 x 10(-3) N/m with the increase in N(2) flow rate from 5 x 10(-6) to 25 x 10(-6) m(3)/min. The coefficient of friction (COF) of the coated molds decreased with increased N(2) flow rate.

• 出版日期2011-6-5
• 单位南阳理工学院