Applications of Microelectromechanical Systems in Industrial Processes and Services

作者：Dean Robert Neal Jr^*; Luque Antonio

来源：IEEE Transactions on Industrial Electronics, 2009, 56(4): 913-925.

DOI：10.1109/TIE.2009.2013691

• Gyroscopes
• microelectromechanical systems (MEMS)
• particle production

This paper presents a review of the current and future applications of microelectromechanical systems (MEMS) in the industrial sector. A historical perspective of the origin and development of MEMS is presented, as well as the traditional and innovative fabrication techniques. The process How of computer-aided design and simulation is also discussed. After that, several of the most important applications of microsystems in the manufacturing and production sectors are enumerated and described. Two case examples are discussed in depth: gyroscopes for the measurement of angular movement, where the basic laws are provided, and a thorough review of existing devices is presented; and particle production devices for the generation of micrometersized droplets, where the two most common techniques are compared, along with the challenges that remain open. Finally, some conclusions and perspective for the future are presented and discussed.

• 出版日期2009-4