Asymmetric surface barrier discharge plasma driven by pulsed 13.56 MHz power in atmospheric pressure air

作者：Dedrick J^*; Boswell R W; Charles C

来源：Journal of Physics D: Applied Physics , 2010, 43(34): 342001.

DOI：10.1088/0022-3727/43/34/342001

Barrier discharges are a proven method of generating plasmas at high pressures, having applications in industrial processing, materials science and aerodynamics. In this paper, we present new measurements of an asymmetric surface barrier discharge plasma driven by pulsed radio frequency (rf 13.56 MHz) power in atmospheric pressure air. The voltage, current and optical emission of the discharge are measured temporally using 2.4 kV(p-p) (peak to peak) 13.56 MHz rf pulses, 20 mu s in duration. The results exhibit different characteristics to plasma actuators, which have similar discharge geometry but are typically driven at frequencies of up to about 10 kHz. However, the electrical measurements are similar to some other atmospheric pressure, rf capacitively coupled discharge systems with symmetric electrode configurations and different feed gases.

• 出版日期2010-9-1