Applications of thick Sacrificial-Layer of zinc in LIGA process

作者：Huang XinLong; Liu Gang; Ying Xiong; Wang Jun; Guo Yuhua; Kang Chunlei; Tian Yangchao^*

来源：Microsystem Technologies, 2008, 14(9-11): 1257-1261.

DOI：10.1007/s00542-007-0543-6

Sacrificial-Layer technology is widely used in the microfabrication field of SLIGA. In this paper, thick sacrificial layers of zinc techniques are studied. A movable structure with aspect ratio of 25 has been fabricated by using zinc sacrificial layer through LIGA technique. Compared with conventional metal sacrificial layers of titanium or copper, the thickness of zinc layer can grow up to more than 10 mu m. The adhesion of different seed layers and the physiognomy of sacrificial layer are also focused in this paper.

• 出版日期2008-10
• 单位中国科学技术大学