科研之友
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摘要
This paper presents a planar waveguide grating sensor integrated with a photodetector (PD) for on-chip optical sensing systems which are suitable for diagnostics in the field and in situ measurements. A III-V semiconductor-based thin-film PD is integrated with a polymer-based waveguide grating device on a silicon platform. The fabricated optical sensor successfully discriminates optical spectral characteristics of the polymer waveguide grating from the on-chip PD. In addition, its potential use as a refractive index sensor is demonstrated. Based on a planar waveguide structure, the demonstrated sensor chip may incorporate multiple grating waveguide sensing regions with their own optical detection PDs. In addition, the demonstrated processing is based on a post-integration process which is compatible with silicon complementary metal-oxide-semiconductor electronics. Potentially, this leads to a compact, chip-scale optical sensing system which can monitor multiple physical parameters simultaneously without the need for external signal processing.
