Applicability of self-consistent global model for characterization of inductively coupled Cl-2 plasma

作者：Efremov A M; Kim Gwan Ha; Kim Jong Gyu; Bogomolov A V; Kim Chang Il^*

来源：Vacuum, 2007, 81(5): 669-675.

DOI：10.1016/j.vacuum.2006.09.017

• Cl-2 inductive plasma
• modeling
• electron temperature
• dissociation
• ionization
• rate coefficient
• density

Investigations of the influence of gas pressure and input power on the Cl, plasma parameters in the inductively coupled plasma system were carried out. The investigations combined plasma diagnostics by Langmuir probe with plasma modeling represented by the self-consistent global model with Maxwellian approximation for the electron energy distribution function. From the experiments, it was found that the increase of gas pressure in the range of 0.27-3.33 Pa for 400-700 W of input power results in a decrease in both electron temperature (3.3-2.0 eV) and density (6.5 x 10(16)-3.0 x 10(16) m(-3) for 400 W and 1.2 x 10(17)-6.7 x 10(16) m(-3) for 700 W). For the given range of experimental conditions, the model showed an outstanding agreement with the experiments and provided the data on kinetics of plasma active species, their densities and fluxes.

• 出版日期2007-1-5