A Deep UV Sensitive Ta2O5/a - IGZO TFT

作者：Chiu C J^*; Weng W Y; Chang S J; Chang Sheng Po; Chang T H

来源：IEEE Sensors Journal, 2011, 11(11): 2902-2905.

DOI：10.1109/JSEN.2011.2146770

• a-IGZO
• solar-blind ultraviolet (UV) photodetctor
• Ta2O5
• thin-film-transistor (TFT)

The authors report the fabrication of a deep-ultraviolet (deep-UV) sensitive a-IGZO thin-film-transistor (TFT) with Ta2O5 gate dielectric. It was found that carrier mobility, threshold voltage and subthreshold swing were 48.5cm(2)/vs, 1.25 V and 0.49 V/decade, respectively, when measured in dark. It was also found that measured current increased from 1.5 x 10(-9) A to 5.56 x 10(-5) A, as we illuminated the sample with lambda = 250 nm UV light when V-G was biased at 0 V. Furthermore, it was found that deep-UV-to-visible rejection ratio could reach 1.0 x 10(6) for the fabricated Ta2O5/a-IGZO TFT.

• 出版日期2011-11