科研之友
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摘要
An improved slider-type graphite cassette for liquid phase epitaxy in a horizontal reactor is described. The cassette ensures the complete removal of the remains of the solution-melt from the surface of an epitaxial layer owing to precise adjustment of the gap height between the layer surface and the edge of the lower surface of the cassette stator. The gap height is determined by measuring the gas flow passing through the gap with a gas rotameter. The quality of the surface of InSb layers grown with the new cassette is compared to the quality of layers obtained in an ordinary cassette.
- 出版日期2010-3
