Atomic force microscope probe-based nanometric scribing

作者:Malekian M*; Park S S; Strathearn D; Mostofa Md G; Jun M B G
来源:Journal of Micromechanics and Microengineering, 2010, 20(11): 115016.
DOI:10.1088/0960-1317/20/11/115016

摘要

Miniaturization of machine components is recognized by many as a significant technological development for a vast spectrum of products. An atomic force microscope (AFM) probe that can exert forces onto a variety of engineering materials is used to perform mechanical scribing at the nanoscale. The success of nanomechanical machining at such fine scales is based on the understanding of microstructural machining mechanics. This paper investigates the cutting behaviour in the nanoscale of a chromium workpiece by using a retrofitted commercial AFM with an acoustic emission sensor, in order to scratch the surface and measure forces. The calibration procedure for acquiring the forces is discussed. The cutting force model, which incorporates the flow stress and friction coefficient in the nano-scale machining, is also presented.

  • 出版日期2010-11