Scanning tunneling microscope-based local electroluminescence spectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure

作者：Watanabe Kentaro^*; Ichikawa Masakazu; Nakamura Yoshiaki; Kuboya Shigeyuki; Katayama Ryuji; Onabe Kentaro

来源：Journal of Vacuum Science and Technology B, 2012, 30(2): 021802.

DOI：10.1116/1.3684985

Local characterization of electroluminescence (EL) from working light-emitting devices is a key to developing and improving their EL properties. The authors developed a scanning tunneling microscope- (STM-) EL technique based on conductive optical fiber probe STM with homemade bipolar sample holder and we demonstrated spatially resolved STM-EL nanospectroscopy of p-AlGaAs/i-GaAs/n-AlGaAs double heterostructure (110) cross-sections. The lateral spatial resolution of the STM-EL measurement was evaluated to be about 0.9 mu m, whose origin was attributed to far-field EL collection by the tapered core of the optical fiber probe. This lateral spatial resolution agrees with the estimated spatial resolution of 1.1 mu m in lateral and 1.2 mu m in depth.

• 出版日期2012-3